NANOINDENTATION-INDUCED PHASE TRANSFORMATION IN SILICON

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dc.contributor.author Rao R. en_US
dc.contributor.author Bradby J.-E. en_US
dc.contributor.author Williams J.-S. en_US
dc.date.accessioned 2007-02-20T13:15:30Z
dc.date.available 2007-02-20T13:15:30Z
dc.date.issued 2006 en_US
dc.identifier.citation European Nano Systems 2006, Paris, France, 14-15 December 2006, ENS 2006, Co-locating with Nano Transfer 2006, The 2nd Worshop on Nano Technology Transfer in Europe, p. 46-49 en_US
dc.identifier.isbn 2-916187-05-7 en_US
dc.identifier.uri http://hdl.handle.net/2042/6795
dc.description.abstract nanoindentation, phase transformation, siliconNanoindentation-induced phase transformation in silicon has been studied. A series of nanoindentations were made with the sharp diamond Berkovich tip. During nanoindentations, maximum load ranged from 2000 µN to 5000 µN, with a 1000 µN/sec loading rate. Slow unloading rate at 100µN/sec was chosen to favor the formation of the crystalline end phases, high pressure phase (Si-III and Si-XII). Fast unloading rate at 1000µN/sec was used to obtain amorphous phase. The phase transformation was examined by Raman spectroscopy and plan-view transmission electron microscopy (TEM). HPP have been identified even if no “pop-in” and “pop-out” observed in load-depth characteristics curves. HPP appeared in c-Si when the maximum load up to 3000 µN. TEM images have been revealed that the optimization HPP transformation in c-Si at the nanoscale occurred when the maximum load applied at 5000 µN. en_US
dc.format.extent 504696 bytes
dc.format.mimetype application/pdf
dc.language.iso EN en_US
dc.publisher TIMA Editions , Grenoble, France en_US
dc.rights http://irevues.inist.fr/utilisation en_US
dc.source European Nano Systems 2006, Paris, France, 14-15 December 2006, ENS 2006, Co-locating with Nano Transfer 2006, The 2nd Worshop on Nano Technology Transfer in Europe, p. 46-49 en_US
dc.subject nanoindentation, phase transformation, silicon en_US
dc.title NANOINDENTATION-INDUCED PHASE TRANSFORMATION IN SILICON en_US
dc.type Conference proceeding en_US
dc.contributor.affiliation The Australian National University [Australia] en_US
dc.contributor.affiliation The Australian National University [Australia] en_US
dc.contributor.affiliation The Australian National University [Australia] en_US


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