Measurements of thermophysical property of thin films by light pulse heating thermoreflectance methods

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dc.contributor.author Baba, T. en_US
dc.contributor.author Ishikawa, K. en_US
dc.contributor.author Yagi, T. en_US
dc.contributor.author Taketoshi, N. en_US
dc.date.accessioned 2006-12-12T13:47:54Z
dc.date.available 2006-12-12T13:47:54Z
dc.date.issued 2006 en_US
dc.identifier.citation Proceedings of 12th International Workshop on Thermal investigations of ICs, THERMINIC 2006, p. 151-156 en_US
dc.identifier.isbn 2-916187-04-9 en_US
dc.identifier.other handle TIMA 2243/therminic2006_MTP151 en_US
dc.identifier.uri http://hdl.handle.net/2042/6568
dc.description.abstract Thermoreflectance methods by picosecond pulse heating and by nanosecond pulse heating have been developed under the same geometrical configuration as the laser flash method by the National Metrology Institute of JAPAN, AIST. Using these light pulse heating methods, thermal diffusivity of each layer of multilayered thin films and boundary thermal resistance between the layers can be determined from the observed transient temperature curves based on the response function method. The measurement results of various thin films as transparent conductive films used for flat panel displays, hard coating films and multilayered films of the next generation phase-change optical disk will be presented. en_US
dc.format.extent 147659 bytes
dc.format.mimetype application/pdf
dc.language.iso EN en_US
dc.publisher TIMA Editions , Grenoble, France en_US
dc.rights http://irevues.inist.fr/utilisation en_US
dc.source Proceedings of 12th International Workshop on Thermal investigations of ICs, THERMINIC 2006, p. 151-156 en_US
dc.subject Thermoreflectance methods, Thermal diffusivity, Thin Films, Boundary thermal resistance en_US
dc.title Measurements of thermophysical property of thin films by light pulse heating thermoreflectance methods en_US
dc.type Conference proceeding en_US
dc.contributor.affiliation National Metrology Institute of Japan - AIST [Japan] en_US
dc.contributor.affiliation National Metrology Institute of Japan - AIST [Japan] en_US
dc.contributor.affiliation National Metrology Institute of Japan - AIST [Japan] en_US
dc.contributor.affiliation National Metrology Institute of Japan - AIST [Japan] en_US


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