Bottom-up approach to silicon nanoelectronics

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URI: http://hdl.handle.net/2042/6290
Title: Bottom-up approach to silicon nanoelectronics
Author: Oda, S.; Mizuta, H.
Abstract: Silicon, nanoelectronics, nanodotsThis paper presents a brief review of our recent work investigating a novel bottom-up approach to realize silicon based nanoelectronics. We discuss fabrication technique, electronic properties and device applications of silicon nanodots as a building block for nanoscale silicon devices.
Description: 103-108
Subject: Silicon, nanoelectronics, nanodots
Publisher: TIMA Editions , Grenoble, France
Date: 2006

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