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Browsing 2006 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS by Author "Zickar, M."

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Development of scanning MEMS mirror with new assembly structure

Wang, Z.-F.; Noell, W.; Zickar, M.; De Rooij, N.; Lim, S.-P. (TIMA Editions , Grenoble, France, 2006)

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