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Browsing 2006 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS by Author "Auxitrol sa - Esterline Corporation [France]"

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Design of bossed silicon membranes for high sensitivity microphone applications

Martins, P.; Beclin, S.; Metivet, S.; Stojanovic, O.; Malhaire, C. (TIMA Editions , Grenoble, France, 2006)

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