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Browsing 2006 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS by Author "ARCES-DEIS - University of Bologna [Italy]"

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Capacitive test-structures design methodology for the extraction of AIR-GAP and dielectric thickness of a MEMS process

Bellei, M.; Margesin, B.; Gaddi, R.; Gnudi, A.; Giacomozzi, F. (TIMA Editions , Grenoble, France, 2006)

Now showing items 1-1 of 1

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