Characterization and Modeling of an Electro-thermal MEMS Structure

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URI: http://hdl.handle.net/2042/16921
Title: Characterization and Modeling of an Electro-thermal MEMS Structure
Author: Szabo, P.G.; Szekely, Vladimir
Abstract: Thermal functional circuits are an interesting and perspectivic group of the MEMS elements. A practical realization is called Quadratic Transfer Characteristic (QTC) element which driving principle is the Seebeck-effect. In this paper we present the analyses of a QTC element from different perspectives. To check the real behavior of the device, we measured a few, secondary properties of the structure which correspond to special behavior because these properties can not be easily derived from the main characteristics.
Publisher: EDA Publishing, Grenoble, France
Date: 2008

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