Sub-µ structured Lotus Surfaces Manufacturing

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dc.contributor.author Worgull, M. en_US
dc.contributor.author Heckele, M. en_US
dc.contributor.author Mappes, T. en_US
dc.contributor.author Matthis, B. en_US
dc.contributor.author Tosello, G. en_US
dc.contributor.author Metz, T. en_US
dc.contributor.author Gavillet, J. en_US
dc.contributor.author Koltay, P. en_US
dc.contributor.author Hansen, H. N. en_US
dc.contributor.author Koltay, P. en_US
dc.contributor.other matthias.worgull@imt.fzk.de en_US
dc.contributor.other mathias.heckele@imt.fzk.de en_US
dc.date.accessioned 2008-04-15T14:52:26Z
dc.date.available 2008-04-15T14:52:26Z
dc.date.issued 2008 en_US
dc.identifier.citation Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2008, Nice, France, p. 330-334 en_US
dc.identifier.isbn 978-2-35500-006-5 en_US
dc.identifier.uri http://hdl.handle.net/2042/16917
dc.description.abstract Sub-micro structured surfaces allow modifying the behavior of polymer films or components. Especially in micro fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary to decouple the bottom and the top of the functional layer. Unlike to stochastic methods, patterning with a LIGA-mold insert it is possible to structure surfaces very uniformly or even with controlled variations (e.g. with gradients). In this paper we present the process chain to realize polymer sub-micro structures with minimum lateral feature size of 400 nm and up to 4 μm high. en_US
dc.format.extent 1176654 bytes
dc.format.mimetype application/pdf
dc.language.iso EN en_US
dc.publisher EDA Publishing, Grenoble, France en_US
dc.rights http://irevues.inist.fr/utilisation en_US
dc.source Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2008, Nice, France, p. 330-334 en_US
dc.title Sub-µ structured Lotus Surfaces Manufacturing en_US
dc.type Conference proceeding en_US
dc.contributor.affiliation Institut für Mikrostrkturtechnic, Forschungszentrum Karlsruhe, Karlsruhe, DE en_US
dc.contributor.affiliation Institut für Mikrostrkturtechnic, Forschungszentrum Karlsruhe, Karlsruhe, DE en_US
dc.contributor.affiliation Institute for Microstructure Technology (IMT), University of Karlsruhe (TH), DE en_US
dc.contributor.affiliation Institut für Mikrostrkturtechnic, Forschungszentrum Karlsruhe, Karlsruhe, DE en_US
dc.contributor.affiliation Department of Mechanical Engineering (MEK), Technical University of Denmark (DTU), DK-2800 Kgs. Lyngby, DK en_US
dc.contributor.affiliation Department of Microsystems Engineering (IMTEK), University of Freiburg, DE en_US
dc.contributor.affiliation Laboratory of Innovation for New Energy Technologies and Nanomaterials (LITEN), French Atomic Energy Commission (CEA), 38054 Grenoble, FR en_US
dc.contributor.affiliation Department of Microsystems Engineering (IMTEK) - University of Freiburg, 79110 Freiburg, DE en_US
dc.contributor.affiliation Department of Mechanical Engineering (MEK), Technical University of Denmark (DTU), DK-2800 Kgs. Lyngby, DK en_US
dc.contributor.affiliation Department of Microsystems Engineering (IMTEK), University of Freiburg, 79110 Freiburg, DE en_US


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