INTEGRATED 3D SOUND INTENSITY SENSOR WITH FOUR-WIRE PARTICLE VELOCITY SENSORS

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URI:	http://hdl.handle.net/2042/16882
Title:	INTEGRATED 3D SOUND INTENSITY SENSOR WITH FOUR-WIRE PARTICLE VELOCITY SENSORS
Author:	Yntema, Doekle; Van Honschoten, Joost; Wiegerink, Remco
Abstract:	A new symmetrical four-wire sensor configuration has resulted in a fully integrated sound intensity sensor with significant lower noise floor and smaller size than its predecessors. An integrated sound pressure sensor was further miniaturized by using a folded “back chamber” at both sides of the chip.
Publisher:	EDA Publishing, Grenoble, France
Date:	2008

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