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URI:
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http://hdl.handle.net/2042/16859
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Title:
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A New Four States High Deflection Low Actuation Voltage Electrostatic Mems Switch for RF Applications |
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Author:
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Robin, Renaud; Touati, Salim; Segueni, Karim; Millet, Olivier; Buchaillot, Lionel
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Abstract:
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This paper presents a new electrostatic MEMS (MicroElectroMechanical System) based on a single high reliability totally free flexible membrane. Using four electrodes, this structure enables four states which allowed large deflections (4µm) with low actuation voltage (7,5V). This design presents also a good contact force and improve the restoring force of the structure. As an example of application, a Single Pole Double Throw (SPDT) for 24GHz applications, based on this design, has been simulated. |
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Publisher:
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EDA Publishing, Grenoble, France |
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Date:
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2008 |
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