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URI:
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http://hdl.handle.net/2042/16858
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Title:
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Design and Fabrication of a Novel Micro Electromagnetic Actuator |
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Author:
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Lee, C.-Y.; Chen, Zgen-Hui; Chang, Hsien-Tseng; Cheng, Chiang-Ho; Wen, Chih-Yung
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Abstract:
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The present study presents a new micro electromagnetic actuator utilizing a PDMS membrane with a magnet. The actuator is integrated with micro coils to electromagnetically actuate the membrane and results in a large deflection. The micro electromagnetic actuator proposed in this study is easily fabricated and is readily integrated with existing bio-medical chips due to its planar structure. |
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Publisher:
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EDA Publishing, Grenoble, France |
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Date:
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2008 |
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