Influence of Transparent Surface Layer on Effective Thermoreflectance Coefficient of Typical Stacked Electronic Structures

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URI: http://hdl.handle.net/2042/14671
Title: Influence of Transparent Surface Layer on Effective Thermoreflectance Coefficient of Typical Stacked Electronic Structures
Author: Komarov, P. L.; Burzo, M. G.; Raad, P. E.
Abstract: It has long been understood that the thermoreflectance coefficient (CTR) varies as a function of light wavelength and material composition. More recent investigations of typical multi-layered electronic devices have uncovered that CTR is also influenced dramatically by the presence of a surface passivation (transparent) layer. It is believed that the effective CTR is made up of a combination of an intrinsic value and a contribution resulting from the interference of the light beams reflecting from the interfaces of the layers in the light path. This investigation is targeted at determining the effective CTR for composite structures typically found in microelectronic devices; namely, transparent passivation layers covering either semiconductor or metallic materials.
Subject: Thermography, thermoreflectance coefficient, calibration, non-contact temperature mapping
Publisher: EDA Publishing Association, Grenoble, France
Date: 2007

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