MEMS Q-FACTOR ENHANCEMENT USING PARAMETRIC AMPLIFICATION : THEORETICAL STUDY AND DESIGN OF A PARAMETRIC DEVICE

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URI: http://hdl.handle.net/2042/14588
Title: MEMS Q-FACTOR ENHANCEMENT USING PARAMETRIC AMPLIFICATION : THEORETICAL STUDY AND DESIGN OF A PARAMETRIC DEVICE
Author: Grasser, L.; Mathias, H.; Parrain, F.; Le Roux, X.; Gilles, J.-P.
Abstract: Parametric amplification is an interesting way of artificially increasing a MEMS Quality factor and could be helpful in many kinds of applications. This paper presents a theoretical study of this principle, based on Matlab/Simulink® simulations, and proposes design guidelines for parametric structures. A new device designed with this approach is presented together with the corresponding FEM simulation results.
Subject: Design and test techniques for MEMS
Publisher: EDA Publishing Association, Grenoble, France
Date: 2007

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