Invited talk 1 : Nanobiosensors based on individual olfactory receptors

• Nanobiosensors based on individual olfactory receptors

session 1 : design and test techniques for MEMS part 1

• ARCHITECTURE FOR INTEGRATED MEMS RESONATORS QUALITY FACTOR MEASUREMENT
• A Reconfigurable Impedance Matching Network Employing RF-MEMS Switches
• Online Sensor Testing through Superposition of Encoded Stimulus
• A novel method for fatigue testing of MEMS devices containing movable elements
• Pulse-Drive and Capacitance Measurement Circuit for MEMS Electrostatic Actuators

Session 2 : Packaging

• 0-level Vacuum Packaging RT Process for MEMS Resonators
• Interconnect Challenges in Highly Integrated MEMS/ASIC Subsystems
• Novel Bonding technologies for wafer-level transparent packaging of MOEMS
• Selection of High Strength Encapsulant for MEMS Devices Undergoing High Pressure Packaging

Poster introduction session

• Monotonic and fatigue testing of spring-bridged freestanding microbeams application for MEMS
• One MEMS Design Tool with Maximal Six Design Flows
• Evaluation of the thermal and hydraulic performances of a very thin sintered copper flat heat pipe for 3D microsystem packages
• Microcantilever-based Weather Station for Temperature, Humidity And Wind Velocity Measurement
• Simulation of valveless micropump and mode analysis
• 2-D Analysis of Enhancement of Analytes Adsorption Due to Flow Stirring by Electrothermal Force in The Microcantilever Sensor
• Studies of Polymer Deformation and Recovery in Hot Embossing
• A High-Q Microwave MEMS Resonator
• DESIGN AND FABRICATION OF THE SUSPENDED HIGH-Q SPIRAL INDUCTORS WITH X-BEAMS
• Modeling of T-Shaped Microcantilever Resonators
• Reduced 30% scanning time 3D multiplexer integrated circuit applied to large array format 20KHZ frequency inkjet print heads
• Optimization of Cricket-inspired, Biomimetic Artificial Hair Sensors for Flow Sensing
• Bridge configurations in piezoresistive two-axis accelerometers
• Set-up and characterization of a humidity sensor realized in LTCC-technology
• Experimental Characterization of the static behaviour of microcatntilevers electrostatically actuated
• From MEMS Devices to Smart Integrated Systems

Session 3 : Modeling, simulation and CAD tools for MEMS

• Noise and thermal stability of vibrating micro-gyrometers preamplifiers
• Design and Modeling of Micromechanical GaAs based Hot Plate for Gas Sensors
• Modeling of a piezoelectric micro-scanner
• Model for Gas Damping in Air Gaps of RF MEMS Resonators
• Towards a Methodology for Analysis of Interconnect Structures for 3D-Integration of Micro Systems

Session 4 : Manufacturing Techniques

• A Two-Step Etching Method to Fabricate Nanopores in Silicon
• FORMATION OF EMBEDDED MICROSTRUCTURES BY THERMAL ACTIVATED SOLVENT BONDING
• Profile Control of a Borosilicate-Glass Groove Formed by Deep Reactive Ion Etching
• Lamination And Microstructuring Technology for a Bio-Cell Multiwell
• SURFACE GENERATION ANALYSIS IN MICRO END-MILLING CONSIDERING THE INFLUENCES OF GRAIN
• Tuneable Capacitor based on dual picks profile of the sacrificial layer

Session 5 : Mechanical simulation of beams and sensors

• Analysis of Asymmetric Piezoelectric Composite Beam
• Analysis of polysilicon micro beams buckling with temperature-dependent properties
• Parameter Identification of Pressure Sensors by Static and Dynamic Measurements

Session 6 : Devices

• AN INTEGRATED CIRCUIT COMPATIBLE COMPACT PACKAGE FOR THERMAL GAS FLOWMETERS
• OUT-OF-PLANE CMOS COMPATIBLE MAGNETOMETERS
• Copper Planar Microcoils Applied to Magnetic Actuation

Session 7 : Design and test techniques for MEMS part II

• IDENTIFICATION OF TEST STRUCTURES FOR REDUCED ORDER MODELING OF THE SQUEEZE FILM DAMPING IN MEMS
• COMPARISON OF TWO LOW-POWER ELECTRONIC INTERFACES FOR CAPACITIVE MEMS SENSORS
• Solving functional reliability issue for an optical electrostatic switch
• Gas Damping Coefficient Research for MEMS Comb Linear Vibration Gyroscope
• MEMS Q-FACTOR ENHANCEMENT USING PARAMETRIC AMPLIFICATION : THEORETICAL STUDY AND DESIGN OF A PARAMETRIC DEVICE

Session 8 : Sensors & device

• Biodegradable Polylactic Acid (PLA) Microstructures for Scaffold Applications
• Enhanced Sensing Characteristics in MEMS-based Formaldehyde Gas Sensor
• Silicon microneedles array with biodegradable tips for transdermal drug delivery
• DEVELOPMENT AND APPLICATION OF A DIAPHRAGM MICRO-PUMP WITH PIEZOELECTRIC DEVICE
• A Novel X-Axis Tuning Fork Gyroscope with "8 Vertical Springs-Proofmass" Structure on (111)-Silicon

Special session on micro power generators and micro energy sources part I

• MICROMACHINED POLYCRYSTALLINE SIGE-BASED THERMOPILES FOR MICROPOWER GENERATION ON HUMAN BODY
• A High Power Density Electrostatic Vibration-to-Electric Energy Converter Based On An In-Plane Overlap Plate (IPOP) Mechanism
• CHARACTERISATION OF AN ELECTROSTATIC VIBRATION HARVESTER
• A complete study of electroactive polymers for energy scavenging : modelling and experiments

Session 9 : RF & optical

• Development of a Nanostructual Microwave Probe Based on GaAs
• Fabrication of MEMS Resonators in Thin SOI
• New Horizontal Frustum Optical Waveguide Fabrication Using UV Proximity Printing
• A FULLY PARAMETERIZED FEM MODEL FOR ELECTROMAGNETIC OPTIMIZATION OF AN RF MEMS WAFER LEVEL PACKAGE
• SILICON ON NOTHING MEMS ELECTROMECHANICAL RESONATOR

Special session on micro power generators and micro energy sources part II

• Ni-MH battery modelling for ambient intelligence applications
• HIGH EFFICIENCY 3-PHASE CMOS RECTIFIER WITH STEP UP AND REGULATED
• Step-up converter for electromagnetic vibrational energy scavenger
• DESIGN, FABRICATION AND CHARACTERIZATION OF A PIEZOELECTRIC MICROGENERATOR INCLUDING A POWER MANAGEMENT CIRCUIT

Session 10 : Non silicon

• LIQUID DENSITY SENSING USING RESONANT FLEXURAL PLATE WAVE DEVICE WITH SOL-GEL PZT THIN FILMS
• Nanotransfer Method of PZT Film onto the Polymer Substrate
• Modeling of large area hot embossing
• Usage of Porous Al2O3 Layers for RH Sensing
• Fabrication of Miniaturized Variable-focus Lens Using Liquid Filling Technique